PREDICTION OF THE PLANAR MAGNETRON EROSION ZONE 

Gorbunov Nikolay Vasilevich, candidate of technical sciences, associate professor, sub-department of design of electronics for megascience experimental setup, State University of Dubna (19 Universitetskaya street, Dubna, Moscow region, Russia); head of sector, Joint Institute for Nuclear Research (6 Zh. Kyuri street, Dubna, Moscow region, Russia), E-mail: nikolai_gorbunov@mail.ru
Kolesnikov Alexander Georgievich, head of the thin film laboratory, State University of Dubna (19 Universitetskaya street, Dubna, Moscow region, Russia), E-mail: torgcentr2004@mail.ru
Kryukov Yuri Alekseevich, candidate of technical sciences, associate professor, vice-rector for research and innovation, State University of Dubna (19 Universitetskaya street, Dubna, Moscow region, Russia), E-mail: kua@uni-dubna.ru
Smolyanin Timofey Andreevich, master degree student, State University of Dubna (19 Universitetskaya street, Dubna, Moscow region, Russia); engineer, Joint Institute for Nuclear Research (6 Zh. Kyuri street, Dubna, Moscow region, Russia), E-mail: metallhead97@bk.ru 

620.191 

10.21685/2307-4205-2020-1-7 

Prediction of the shape of the target’s production during magnetron sputtering is of great practical importance for the efficient use of the target material and the production of uniform film layers. A method is proposed for predicting the erosion of a target of magnetron sputtering systems, which is based on the assumptions of a direct relationship between the Bx value of the component of the magnetic field vector B parallel to the target plane and the ionization efficiency of the working gas atoms and a decrease in the density of ionization processes in proportion to the magnetic field attenuation. The boundaries and shape of the erosion region he(x) are determined by the cosine of the angle between B and Bx, and the shape of the erosion groove hg(x) is determined by the Gaussian distribution for the ratio Bx/B relative to the average value equal to unity. The practical implementation is based on the software package for modeling and calculating physical fields by the finite element method ELCUT, which forms the output matrices of the induction vector B and its components. To determine the shape of the erosion profile, a Pretarger calculation program based on MATLAB was developed. 

defects in materials, control, chemical and physico-chemical effects, corrosion, erosion, surface defects, surface defects